Atom implantation for reduction of compressive stress

ABSTRACT

Systems, apparatuses, and methods related to atom implantation for reduction of compressive stress are described. An example method may include patterning a working surface of a semiconductor, the working surface having a hard mask material formed over a dielectric material and forming a material having a lower refractive index (RI), relative to a RI of the hard mask material, over the hard mask material. The method may further include implanting atoms through the lower RI material and into the hard mask material to reduce the compressive stress in the hard mask material.

TECHNICAL FIELD

The present disclosure relates generally to semiconductor devices andmethods, and more particularly to atom implantation for reduction ofcompressive stress (e.g., in material of a semiconductor device).

BACKGROUND

Memory devices are typically provided as internal, semiconductor,integrated circuits in computers or other electronic devices. There aremany different types of memory, including random-access memory (RAM),read only memory (ROM), dynamic random access memory (DRAM), staticrandom access memory (SRAM), synchronous dynamic random access memory(SDRAM), ferroelectric random access memory (FeRAM), magnetic randomaccess memory (MRAM), resistive random access memory (ReRAM), and flashmemory, among others. Some types of memory devices may be non-volatilememory (e.g., ReRAM) and may be used for a wide range of electronicapplications in need of high memory densities, high reliability, and lowpower consumption. Volatile memory cells (e.g., DRAM cells) requirepower to retain their stored data state (e.g., via a refresh process),as opposed to non-volatile memory cells (e.g., flash memory cells),which retain their stored state in the absence of power. However,various volatile memory cells, such as DRAM cells may be operated (e.g.,programmed, read, erased, etc.) faster than various non-volatile memorycells, such as flash memory cells. Such types of memory, and componentsassociated therewith, may be formed using elevated temperatures that mayapply stress to the components.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1A illustrates a cross-sectional view of a portion of an examplememory device at various points in time in an example fabricationsequence of using atom implantation for reduction of compressive stressin accordance with a number of embodiments of the present disclosure.

FIG. 1B illustrates a cross-sectional view of a portion of anotherexample memory device at a particular point in time in another examplefabrication sequence of using atom implantation for reduction ofcompressive stress in accordance with a number of embodiments of thepresent disclosure.

FIG. 2 is a flow diagram of an example method for using atomimplantation for reduction of compressive stress in accordance with anumber of embodiments of the present disclosure.

FIG. 3 is a flow diagram of another example method for using atomimplantation for reduction of compressive stress in accordance with anumber of embodiments of the present disclosure.

FIG. 4 is a flow diagram of another example method for using atomimplantation for reduction of compressive stress in accordance with anumber of embodiments of the present disclosure.

FIG. 5 is a functional block diagram of a system for implementation ofan example semiconductor fabrication process in accordance with a numberof embodiments of the present disclosure.

FIG. 6 is a functional block diagram of a computing system including atleast one memory system in accordance with one or more embodiments ofthe present disclosure.

FIG. 7 illustrates an example cross-sectional view of a portion of asemiconductor memory device in accordance with a number of embodimentsof the present disclosure.

DETAILED DESCRIPTION

Various types of memory devices may have conductive pathways to enableaccess to various components. The conductive pathways may includeelectrodes, access lines (e.g., word lines), and sense lines (e.g., bitlines), among other possible conductive pathways. The componentsaccessible via the conductive pathways may include control circuitry,sense amplifiers, memory cells, transistors, and memory storage nodes(e.g., capacitors), among other possible components.

Among the various possible components of memory devices is, in a numberof embodiments, a sense line to enable conductive contact between astorage node and a respective access device for determination of acharge level (e.g., a stored data value) on the storage node. Such asense line may be formed as a pillar. In a number of embodiments, thesense line pillars may be formed as, or become through performance ofvarious processes in a fabrication sequence, separate columns of stackedsemiconductor materials having round, square, oblong, etc.,cross-sections and that may each extend substantially vertically from asubstrate on which they are positioned. Openings adjacent such pillarsmay be created by spacing preformed pillars at a predetermined distancefrom each other on the substrate or by forming (e.g., etching) thepillars from a stack of materials on the substrate at a predetermineddistance from each other. Alternatively, pillars may be formed asseparate walls of stacked semiconductor materials that may each extendsubstantially vertically from a substrate on which they are positionedor have been formed. The openings adjacent such pillars may be createdby spacing the walls at a predetermined distance from each other on thesubstrate so as to form substantially rectilinear trenches between thepillars. The openings may contribute to isolation of sense line pillarsfrom each other.

As used herein, “pillar material” is intended to include variousmaterials (e.g., elements or compounds) that may be formed as, or in,one or more layers to form a pillar. For example, a sense line pillarmay have a conductive material (e.g., tungsten, copper, silver, etc.) ofthe conductive pathway formed as part of (e.g., within) a pillar ofsemiconductor materials to enable sensing (detection) and/ortransmission of a charge and/or current. In a number of embodiments, asdescribed herein, a sense line pillar may be formed to have a hard maskmaterial positioned over (e.g., formed on) a dielectric material. Amaterial having a lower refractive index (RI), relative to a RI of thehard mask material, may be positioned over (e.g., deposited as a layeron) the hard mask material. The lower RI material may be used as ananti-reflection coating (ARC) during, or at, various points of thefabrication sequence processing. The lower RI material may be formedover the hard mask material at a high temperature (e.g., 350 degreesCelsius (° C.) to 450° C.) relative to a temperature (e.g., ambienttemperature) of the underlying hard mask material. The high temperatureof the lower RI material may contribute to (e.g., cause) a compressivestress in the underlying hard mask material.

During or after formation of the pillars (e.g., by etching through thepillar materials), the compressive stress in the hard mask material maycontribute to (e.g., increase a probability of) unintended consequences.Such unintended consequences may, for example, include an unintendedbend of the pillar relative to the substrate and opening (e.g., notextending substantially vertically from the substrate based on one ormore bends in the pillar) and/or an increased probability of roughness(e.g., line width roughness (LWR) and/or space width roughness (SWR))formed on a sidewall of the pillar. The unintended bend of the pillarand/or the roughness formed on the sidewall of the pillar may contributeto failure (e.g., a short circuit fault) of the pillar. The higher theheight to width aspect ratio (AR) of the pillar, the higher theprobability may be of unmitigated compressive stress in the hard maskmaterial resulting in the unintended bend and/or roughness contributingto failure of the pillar.

As described herein, a number of types of atoms and/or ions may beimplanted through the lower RI material and into the hard mask materialto reduce the compressive stress in the hard mask material. Thecompressive stress described herein is intended to mean a ratio ofstress (force per unit area) to displacement strength of the atoms thatform the hard mask material. The compressive stress may be approximatedas Young's modulus that measures a stiffness of a solid material. In thepresent disclosure, the compressive stress, or Young's modulus, may beexpressed (measured) in megapascals (1 MPa=1 newton/square millimeter).Implantation of the atoms and/or ions into the hard mask material mayloosen distortion of bonds caused by the compressive stress (e.g., bylowering the MPa value) such that the bonds more closely approximatetheir uncompressed three-dimensional (3D) structure.

As such, implantation of the types of atoms and/or ions described hereinmay reduce the level of compressive stress and, hence, the probabilityof compressive stress in the hard mask material contributing to anunintended bend of the pillar or roughness on the sidewall thereof. Thismay contribute to reduction of a probability of failure of the pillar,among reduction of probabilities other possible unintended consequencesof processing the semiconductor device.

The present disclosure includes systems, apparatuses, and methodsrelated to such atom implantation for reduction of compressive stress.An example of a method described herein includes patterning a workingsurface of a semiconductor, the working surface having a hard maskmaterial formed over (e.g., on) a dielectric material and forming amaterial having a lower RI, relative to a RI of the hard mask material,over (e.g., on) the hard mask material. The method may further includeimplanting atoms through the lower RI material and into the hard maskmaterial to reduce the compressive stress in the hard mask material.

In the following detailed description of the present disclosure,reference is made to the accompanying drawings that form a part hereof,and in which is shown by way of illustration how one or more embodimentsof the disclosure may be practiced. These embodiments are described insufficient detail to enable those of ordinary skill in the art topractice the embodiments of this disclosure, and it is to be understoodthat other embodiments may be utilized and that process, electrical,and/or structural changes may be made without departing from the scopeof the present disclosure.

The figures herein follow a numbering convention in which the firstdigit or digits correspond to the figure number of the drawing and theremaining digits identify an element or component in the drawing.Similar elements or components between different figures may beidentified by the use of similar digits. For example, 105 may referenceelement “05” in FIG. 1A, and a similar element may be referenced as 105in FIG. 1B. In some instances, a plurality of similar, but functionallyand/or structurally distinguishable, elements or components in the samefigure or in different figures may be referenced sequentially with thesame element number (e.g., 106-1 and 106-2 in FIG. 1B).

FIG. 1A illustrates a cross-sectional view of a portion of an examplememory device at various points in time in an example fabricationsequence 100 of using atom implantation for reduction of compressivestress. The memory devices described herein include the example memorydevices shown at 669 and 775 and described in connection with FIG. 6 andFIG. 7, respectively, although embodiments are not intended to belimited to these types of memory devices.

The fabrication sequence 100 illustrated in FIG. 1A is shown at points101 in time that correspond to processing activities being performed inthe fabrication sequence 100 (e.g., by a system 550 for processing asshown and described in connection with FIG. 5). The points 101illustrate the structural features after various processing activitieshave been performed along the fabrication sequence 100. The fabricationsequence 100 may include repetition of particular fabrication processingactivities (steps) through a number of iterations (cycles). Otherprocessing activities may have been omitted from FIG. 1A for simplicity.The illustrated processing activities may correspond to formation,removal, and implantation of structural features.

As shown at point 101-1, formation of structural features may, forexample, include formation (e.g., deposition) of a dielectric material105 over (e.g., on) a surface 104 of a substrate 103. The dielectricmaterial 105 may, in a number of embodiments, be a silicon nitride(Si_(x)N_(y)) material (e.g., silicon mononitride (SiN), siliconsesquinitride (Si₂N₃), and/or trisilicontetranitride (Si₃N₄)), althoughembodiments of the dielectric material are not so limited. The substrate103 over which the dielectric material 105 is formed may a substrateappropriate for support of pillars (e.g., pillars 115 shown at point101-6). As such, the substrate 103 may be formed from or include, forexample, a doped or undoped monocrystalline silicon (monosilicon),polycrystalline silicon (polysilicon), and amorphous silicon, amongother possibilities. Formation of the various materials described herein(e.g., as sequential layers thereof over the substrate 103) may beperformed using appropriate wet or dry deposition processes (e.g.,chemical vapor deposition (CVD), plasma deposition, etc.). The variousmaterials may be patterned using these deposition processes and/or byremoval of particular portions of the materials (e.g., usingphotolithographic techniques, doped and etched using vapor, wet and/ordry etch processes) to form semiconductor structures on the substrate103.

The points 101 in time illustrated in FIG. 1A begin at point 101-0.Point 101-0 may encompass processing activities (not shown) in thefabrication sequence 100 performed prior to point 101-1. Point 101-1 inthe fabrication sequence 100 includes forming a hard mask material 106over (e.g., on) the dielectric material 105. The hard mask material 106may be used as a mask that has a resistance to being etched by reactivegases, plasmas, and/or particles (e.g., oxygen, fluorine, chlorine,etc.) greater than a resistance of other “softer” materials that may bemore rapidly removed (e.g., etched) during processing. The hard maskmaterial 106 may include carbon (C) to contribute to the etchresistance. Hard mask material formed as such may, in a number ofembodiments, be selected from a hemicellulose spin-on-carbon (SOC) hardmask, a fullerene SOC hard mask, or an amorphous C hard mask, amongother possible types of C-containing hard mask materials. Hence, using aC-containing hard mask material includes forming the hard mask material106 from substantially pure C, although embodiments are not so limited.

As used herein, the hard mask material 106 formed over the dielectricmaterial 105 is, in combination, termed a working surface 107. Theworking surface 107 includes a top 108 over which other processingactivities in the fabrication sequence 100 may be performed. Forexample, the processing activities shown at points 101-2, 101-3, 101-4,and 101-5, and at times not shown between these points, may be over oron the top 108 of the working surface 107. In contrast, forming thepillars 115 shown at point 101-6 may include etching through the workingsurface 107 (e.g., the hard mask material 106 and the dielectricmaterial 105) to or into the substrate 103.

The fabrication sequence 100 illustrated in FIG. 1A shows at point 101-2that a material 109 having a lower RI, relative to the RI of the hardmask material 106 of the working surface 107, is formed over the top 108of the working surface 107. As such, the lower RI material 109 may beformed adjacent or in contact with the hard mask material 106. The lowerRI material 109 may, in a umber of embodiments, be used (function) as anARC above the working surface 107. The lower RI material 109 may, in anumber of embodiments, be formed from nitrous oxide (N₂O) plasma or fromN₂₀ gas and silane (SiH₄) at a temperature in a range of from around350° C. to around 450° C., among other possible compounds and/ortemperatures usable for formation of the lower RI material 109. Exposureof the hard mask material 106 of the working surface 107 to theseelevated temperatures may increase the compressive stress in the hardmask material 106 relative a compressive stress level in the hard maskmaterial 106 prior to formation of the lower RI material 109 on the top108 of the working surface 107.

The fabrication sequence 100 illustrated in FIG. 1A shows at point 101-3that a photoresist material 110 is formed in a pattern over (e.g., on)the lower RI material 109. At point 101-4, FIG. 1A shows that a portionof the lower RI material 109 has been removed (e.g., by using an etchprocess 111) consistent with the pattern to initiate formation 112 of anumber of pillars of a semiconductor device (as shown completed at 115at point 101-6). Initiation of the formation 112 of the pillars usingthe patterned photoresist material 110 may, in a number of embodiments,include multi-patterning (e.g., double patterning) to provide enoughetch resolution to initiate formation of each of the pillars to meetintended critical dimensions (CDs) of a final structure or intermediarystructures of a semiconductor (e.g., a memory device). For example,multi-patterning may be used to initiate formation of each of thepillars at a particular width (e.g., in a range of from around 50Angstroms (A) to around 100 A) and/or to initiate formation of openingsbetween each of the pillars at a particular width (e.g., in a range offrom around 50 A to around 500 A).

Each pillar 115 may be formed to extend to a particular height 118 abovean upper surface 104 of the substrate material 103. For example, as justdescribed, a pillar 115 may be formed from a dielectric material 105, ahard mask material 106, and a lower RI material 109, among otherpossible materials and/or portions. Adjustment of a height of thevarious materials and/or portions may affect the height 118 of thepillar 115, as adjusting the width of the various materials and/orportions may affect the width 119 of the pillar 115. Variation in theheight 118 and/or width 119 of the pillar 115 determine a particular ARof the pillar 115. The height 118 of a pillar 115 may correspond to adepth of an adjacent opening 117. A width by which each pillar 115 isseparated from another pillar may define a width of the opening 117between sidewalls 116 of the pillars 115. The sidewalls 116 of thepillars 115 may alternatively be termed sidewalls 116 of the opening117, depending on the context.

Deposition and etching may be utilized to form the pillars 115 and theopenings 117, etc. The height 118 and width 119 of the pillars 115, thewidth of the openings 117, and individual thicknesses, configurations,and/or compositions of the dielectric material 105, the hard maskmaterial 106, and the lower RI material 109, among other possiblematerials (portions) of the pillars 115 (e.g., conductive materials) mayvary according to an intended purpose, materials to be formed (e.g.,deposited) therein, CDs, design rule specifications, etc.

The fabrication sequence 100 shows at point 101-5 that atoms 113 may beimplanted through a remaining lower RI material 109 of the initiatedformation of the pillars 112 and into the hard mask material 106 of theworking surface 107. As described herein, the atoms may be implanted toreduce a probability of the unintended bend of, or roughness on, thepillar based on reduction of the compressive stress in the hard maskmaterial 106 (e.g., resulting from or contributed to by formation of thelower RI material 109 at an elevated temperature thereon). Particularatoms 113 may be selected for implantation to reduce the compressivestress in the hard mask material 106. As described herein, atoms 113 ofparticular elements may be selected. The atoms 113 of the selectedelements may, in a number of embodiments, include at least one of carbon(C) and arsenic (As) atoms, and various mixtures thereof. The atoms 113that are selected may be implanted as neutral atoms, ionized atoms, or amixture thereof.

The atoms 113 may be implanted from one or more sources (not shown)positioned above the remaining lower RI material 109. The source(s) maybe a source of the atoms to be implanted and may include an acceleratorto accelerate single atoms, ions, or molecules to an intended energy(velocity) toward the remaining lower RI material 109 and toward theunderlying hard mask material 106 and dielectric material 105 of theworking surface 107.

The atoms 113 may be preferentially implanted to an intended (e.g.,selected) depth and/or an intended density. The number and/or density ofatoms, for example, to be implanted into the hard mask material 106 maybe predetermined to reduce the compressive stress in the hard maskmaterial 106 to an intended level. A capability of achieving thepreselected density of atoms implanted into the hard mask material 106or a time period spent in doing so may be dependent upon an implantenergy supplied by the source. When a particular dose of C atoms, forexample, is selected to be implanted into the hard mask material 106 toa selected depth, a particular dose energy may be selected. For example,when C atoms are selected to be implanted through the remaining lower RImaterial 109 and into the hard mask material 106 at a dose in a range offrom around 1×10¹⁵ per square centimeter (/cm²) to around 1×10¹⁶/cm²,the C atoms may be implanted using an implant energy in a range of fromaround 20 kiloelectron volts (keV) to around 40 keV. When the atoms tobe implanted are other atoms (e.g., As), the keV and densities may beadjusted accordingly to reduce the compressive stress in the hard maskmaterial 106 to an intended level, as described further herein.

The selected depth may, in a number of embodiments, be below theremaining lower RI material 109 and at and/or below the top 108 of thehard mask material 106. A particular depth below the top 108 of the hardmask material 106 to which the atoms 113 are able to be implanted maydepend on the type of atom being implanted, the dose energy applied tothe atoms, the composition of the RI material 109 and/or the hard maskmaterial 106, and/or the relative ability of the elements or compoundsin these materials 109, 106 to block or absorb penetration of theselected atoms, among other possibilities.

The fabrication sequence 100 shows at point 101-6 that a plurality ofpillars 115 (e.g., walls, sense line pillars, among other possibilities)have been formed over (e.g., on) the surface 104 of the substrate 103.The pillars 115 may be formed by removal (e.g., using a selected etchprocess 114) of particular portions of the remaining lower RI material109, the hard mask material 106, and the dielectric material 105. In anumber of embodiments, the particular portions of the materials 109,106, 105 may be removed to the surface 104 of the substrate 103 to formthe pillars 115. The pillars 115 may be formed to a particular height118 (e.g., above the surface 104 of the substrate 103) and a particularwidth 119. In a number of embodiments, the AR of the height 118 to thewidth 119 may be in a range of from around 20:1 to around 30:1.Accordingly, in embodiments in which the width 119 of the pillars 115 isin a range of from around 50 A to around 100 A, the height of thepillars 115 may be in a range of from around 1000 A to around 3000 A,although embodiments are not limited to these ARs, widths, and/orheights. The openings between sidewalls 116 of each of the pillars 115may be formed at a particular width 117 (e.g., in a range of from around50 A to around 500 A).

The atoms 113 shown and described as being implanted at point 101-5 areillustrated at point 101-6 as having an increased density (representedby increased stippling) in the hard mask material 106 portions of thepillars 115 than the densities of the atoms implanted into the lower RImaterial 109 and dielectric material 105 portions. Such a differentialdensity of the implanted atoms 113 (e.g., C and/or As) may be consistentwith (e.g., result from) a selected dose of the atoms and/or a selectedimplant energy. The differential density being greater in the hard maskmaterial 106 may contribute to (e.g., enable) the reduction of thecompressive stress in the hard mask material 106 to an intended level.The removal of the particular portions of the materials 109, 106, 105 toform the pillars 115 may contribute to or enable formation of aplurality of separate access lines, sense lines, or electrodes (e.g., asshown and described in connection with FIG. 7) for the semiconductormemory device based on other processing activities in the fabricationsequence 100 being performed at subsequent points 101-N in time.

FIG. 1B illustrates a cross-sectional view of a portion of anotherexample memory device at a particular point 101-2 in time in anotherexample fabrication sequence 120 of using atom implantation forreduction of compressive stress. A lower RI material may be formed over(e.g., on) a hard mask material in a number of alternate embodiments. Asshown and described in connection with point 101-2 in FIG. 1A, a singlelayer of lower RI material 109 may be formed (e.g., deposited) over asingle layer of hard mask material 106.

In a first alternative fabrication sequence 120 at point 101-2, theworking surface may be patterned to have a first hard mask material106-1 formed over the dielectric material 105 followed by forming afirst lower RI material 109-1, relative to a RI of the first hard maskmaterial 106-1, over the first hard mask material 106-1. A second hardmask material 106-2 may be formed over the first lower RI material 109-1and a second lower RI material 109-2, relative to a RI of the secondhard mask material 106-2, 2 may be formed over the second hard maskmaterial 106-2.

The thicknesses, configurations, and/or compositions of each of thedielectric material 105, the first hard mask material 106-1, the firstlower RI material 109-1, the second hard mask material 106-2, the secondlower RI material 109-2, among other possible portions (e.g., conductivematerials) formed during the first alternative fabrication sequence 120may vary according to an intended purpose, CDs, design rulespecifications, etc. Accordingly, in a number of embodiments, the firsthard mask material 106-1 may be formed to have a same or a differentthickness, configuration, and/or composition relative to the second hardmask material 106-2. Similarly, the first lower RI material 109-1 may beformed to have a same or a different thickness, configuration, and/orcomposition relative to the second lower RI material 109-2. A number(quantity) of layers of the hard mask material 106 and the lower RImaterial 109 each may be three or more in a number of embodiments. Inaddition, a number of the layers of the hard mask material 106 may bethe same as or different from a number of the layers of the lower RImaterial 109.

In the first alternative fabrication sequence 120, the atoms 113 shownand described in connection with point 101-5 in FIG. 1A, may beimplanted through the first and second lower RI materials 109-1, 109-2and into the first and second hard mask materials 106-1, 106-2 to reducethe compressive stress in the first and second hard mask materials. Theatoms 113 may be implanted from the source (not shown) positioned abovethe remaining second lower RI material 109-2. The atoms 113 may bepreferentially implanted to an intended (e.g., selected) depth and/or anintended density in the first hard mask material 106-1 and/or in thesecond hard mask material 106-2. The number and/or density of atoms, forexample, to be implanted into each of the hard mask materials 106-1,106-2 may be predetermined to reduce the compressive stress in the hardmask materials 106-1, 106-2 to an intended level. A capability ofachieving the preselected density of atoms implanted into the hard maskmaterials 106-1, 106-2 or a time period spent in doing so may bedependent upon an implant energy supplied by the source. Depending onthe atoms 113 (e.g., C, As, among other selected atoms) and a selecteddepth at which a peak dose (density) is intended, the keV, the timeperiod, and/or the number of atoms, ions, or mixtures thereofaccelerated per second from the source may be adjusted accordingly toreduce the compressive stress in the hard mask materials 106-1, 106-2 tothe intended level.

In a second alternative fabrication sequence (not shown), the atoms 113may be implanted through a first lower RI material formed over (e.g.,on) a second lower RI material and into, for example, a single hard maskmaterial over (e.g., on) which the second lower RI material is formed,although embodiments are not limited only to a single hard maskmaterial. The first lower RI material may be formed to have a same or adifferent thickness, configuration, and/or composition relative to thesecond lower RI material. For example, in a number of embodiments, thefirst and second lower RI materials may be formed from the same materialor the first lower RI material may be formed from N₂O plasma and thesecond lower RI material may be formed from N₂O gas and SiH₄, althoughembodiments are not so limited. A number (quantity) of layers of thelower RI material may be three or more in a number of embodiments. Inaddition, a number of the layers of the hard mask material may be thesame as or different from a number of the layers of the lower RImaterial.

The atoms 113 may be implanted from the source positioned above theremaining second lower RI material. The atoms 113 may be preferentiallyimplanted to an intended (e.g., selected) depth and/or an intendeddensity in the underlying hard mask material. The number and/or densityof atoms, for example, to be implanted into the underlying hard maskmaterial may be predetermined to reduce the compressive stress in thehard mask material to an intended level. A capability of achieving thepreselected density of atoms implanted into the hard mask material or atime period spent in doing so may be dependent upon an implant energysupplied by the source. Depending on the atoms 113 and a selected depthat which a peak dose (density) is intended, the keV, the time period,and/or the number of atoms, ions, or mixtures thereof accelerated persecond from the source may be adjusted accordingly to reduce thecompressive stress in the hard mask material to the intended level.

In a third alternative fabrication sequence (not shown), the atoms 113may be implanted directly into a hard mask material, which does not havea lower RI material formed thereon, to reduce compressive stress in thehard mask material. In such an alternative fabrication sequence, thelower RI material is formed over (e.g., on) the hard mask materialsubsequent to implantation of the atoms 113 to reduce compressive stressin the hard mask material.

However, the elevated temperature (e.g., 350-450° C.) of the lower RImaterial that is formed (e.g., deposited) over the hard mask materialmay raise the level of the compressive stress in the hard mask materialso as to at least partially reverse the preceding reduction resultingfrom (e.g., caused by) implantation of the atoms 113 into the hard maskmaterial. Hence, implantation of the atoms 113 into the hard maskmaterial subsequent to the lower RI material being formed thereon (asdescribed in the fabrication sequence in connection with FIGS. 1A and 1n the first and second alternative fabrication sequences in connectionwith FIG. 1B) is more effective at reducing the compressive stress inthe hard mask material than using the third alternative fabricationsequence just described.

FIG. 2 is a flow diagram of an example method 225 for using atomimplantation for reduction of compressive stress in accordance with anumber of embodiments of the present disclosure. Unless explicitlystated, elements of methods described herein are not constrained to aparticular order or sequence. Additionally, a number of the methodembodiments, or elements thereof, described herein may be performed atthe same, or at substantially the same, point in time.

At block 226, the method 225 may include patterning a working surface ofa semiconductor, the working surface having a hard mask material formedover (e.g., on) a dielectric material (e.g., as described in connectionwith point 101-1 in FIG. 1A). At block 227, the method 225 may includeforming a material having a lower RI, relative to a RI of the hard maskmaterial, over (e.g., on) the hard mask material (e.g., as described inconnection with point 101-2 in FIGS. 1A and 1 n FIG. 1B). At block 228,the method 225 may include implanting atoms through the lower RImaterial and into the hard mask material to reduce a compressive stressin the hard mask material (e.g., as described in connection with point101-5 in FIG. 1A).

The method 225 may, in a number of embodiments, further include formingthe lower RI material over the hard mask material prior to implantingthe atoms, where the lower RI material is a last material formed overthe hard mask material at a temperature greater than 100° C. As such,the lower RI material will not be formed (e.g., at 350-450° C.), norwill any other material be formed at a temperature greater than 100° C.,over the hard mask material subsequent to implanting the atoms into thehard mask material. Hence, no such material may be formed at atemperature that at least partially reverses the preceding reduction ofthe compressive stress in the hard mask material (e.g., as described inconnection with point 101-2 in FIG. 1B).

The method 225 may further include forming a photoresist material in apattern over the lower RI material and removing a portion of the lowerRI material consistent with the pattern to initiate formation of apillar of a semiconductor device (e.g., as described in connection withpoint 101-4 in FIG. 1A). The atoms may be implanted through a remaininglower RI material and into the hard mask material to reduce aprobability of an unintended bend of the pillar based on the reducedcompressive stress in the hard mask material (e.g., as described inconnection with point 101-5 in FIG. 1A). The method 225 may furtherinclude, alternatively or in addition to reducing the probability of theunintended bend, reducing a potential level of LWR on the pillar and/orreducing a potential level of SWR between the pillar and an adjacentpillar.

The method 225 may further include performing an etch process throughthe lower RI material, the hard mask material, and the dielectricmaterial to form a pillar of a semiconductor device (e.g., as describedin connection with point 101-6 in FIG. 1A). The pillar may be formed tohave an AR in a range of from around 20:1 to around 30:1. The method 225may further include reducing a probability of an unintended bend and/orroughness of the pillar relative to a pillar having an AR in the 20:1 to30:1 range that does not include the atoms implanted through the lowerRI material and into the hard mask material to reduce the compressivestress in the hard mask material.

The method 225 may further include patterning the working surface of thesemiconductor to have a first hard mask material formed over thedielectric material and forming a first lower RI material, relative to aRI of the first hard mask material, over the first hard mask material.The method 225 may further include forming a second hard mask materialover the first lower RI material and forming a second lower RI material,relative to a RI of the second hard mask material, over the second hardmask material (e.g., as described in connection with point 101-2 in FIG.1B). Implanting the atoms through the first and second lower RImaterials and into the first and second hard mask materials may reducethe compressive stress in the first and second hard mask materials.

The method 225 may further include forming the pillar as a sense linepillar to enable conductive contact with a data storage node of asemiconductor device. At least a portion of a memory device may beformed by the method 225. Such a memory device may be formed consistentwith the memory devices shown at 669 and 775 and described in connectionwith FIG. 6 and FIG. 7, respectively, although embodiments are notintended to be limited to these types of memory devices. The memorydevice may have a memory cell structure that includes a sense linepillar (e.g., as shown at 715 and described in connection with FIG. 7)comprising the dielectric material, the hard mask material, the lower RImaterial, and the implanted atoms (e.g., as described in connection withpoint 101-6 in FIG. 1A). In a number of embodiments, the sense linepillar also may include a conductive material. The memory cell structurealso may include a capacitor, as a data storage node (e.g., as shown at790 and described in connection with FIG. 7), in conductive contact withthe conductive material of the sense line pillar. The memory cellstructure also may include an access device (e.g., as shown at 786, 787and described in connection with FIG. 7) in conductive contact with theconductive material of the sense line pillar.

FIG. 3 is a flow diagram of another example method 330 for using atomimplantation for reduction of compressive stress in accordance with anumber of embodiments of the present disclosure. At block 331, themethod 330 may include patterning a working surface of a semiconductor,the working surface having a hard mask material, which includes C,formed over (e.g., on) a dielectric material (e.g., as described inconnection with point 101-1 in FIG. 1A). At block 332, the method 330may include forming a material having a lower RI, relative to a RI ofthe hard mask material, over (e.g., on) the hard mask material (e.g., asdescribed in connection with point 101-2 in FIGS. 1A and 1 n FIG. 1B).At block 333, the method 330 may include implanting C atoms through thelower RI material and into the hard mask material to reduce acompressive stress in the hard mask material (e.g., as described inconnection with point 101-5 in FIG. 1A).

The method 330 may further include increasing the compressive stress inthe hard mask material by formation of the lower RI material over thehard mask material at a temperature of at least 200° C. For example, ina number of embodiments, the lower RI material may be formed over thehard mask material at a temperature in a range of 350-450° C., which mayincrease the compressive stress in the hard mask material. Thecompressive stress in the hard mask material may be increased (e.g.,from substantially 0 MPa prior to formation of the lower RI materialthereon) to at least 150 MPa by formation of the lower RI material overthe hard mask material. The compressive stress has increased to 300-1000MPa by formation of the lower RI material over the hard mask materialduring implementation of some fabrication sequences.

The method 330 may further include subsequently reducing the increasedcompressive stress in the hard mask material by the C atoms beingimplanted through the lower RI material and into the hard mask materialsubsequent to formation of the lower RI material thereon. Thecompressive stress in the hard mask material may be reduced (e.g., fromthe at least 150 MPa) to below 25 MPa by the C atoms being implantedinto the hard mask material. The compressive stress has decreased tosubstantially 0 MPa by the C atoms being implanted into the hard maskmaterial subsequent to formation of the lower RI material thereon duringimplementation of some fabrication sequences.

The method 330 may further include forming a pillar of a semiconductordevice from the lower RI material, the hard mask material, and thedielectric material (e.g., as described in connection with point 101-6in FIG. 1A). A probability of an unintended bend, LWR, and/or SWR of thepillar may be reduced by implantation of the C atoms to reduce thecompressive stress in the hard mask material subsequent to formation ofthe lower RI material over the hard mask material. The reducedprobability may be determined relative to the C atoms being implantedinto the hard mask material prior to formation of the lower RI materialover the hard mask material (e.g., as described in connection with FIG.1B). For example, forming the lower RI material over the hard maskmaterial subsequent to the C atoms being implanted into the hard maskmaterial may increase the compressive stress in the C-implanted hardmask material (e.g., to a MPa level that may approach a MPa levelresulting from formation the lower RI material over the hard maskmaterial when no C atoms have been implanted therein).

The method 330 may, in a number of embodiments, further includeimplanting the C atoms into the hard mask material at an intended dosein a range of from around 1×10¹⁵/cm² to around 1×10¹⁶/cm² (e.g., asdescribed in connection with point 101-5 in FIG. 1A). The method 330may, in a number of embodiments, further include implanting the C atomsthrough the lower RI material using an implant energy in a range of fromaround 5 keV to around 60 keV (e.g., to achieve the intended dose at aparticular peak depth in the hard mask material). In some embodiments,the implant energy used for the C atoms may be in a range of from around20 keV to around 40 keV.

FIG. 4 is a flow diagram of another example method 435 for using atomimplantation for reduction of compressive stress in accordance with anumber of embodiments of the present disclosure. At block 436, themethod 435 may include patterning a working surface of a semiconductor,the working surface having a hard mask material, formed from C (e.g.,substantially pure C), formed over (e.g., on) a dielectric material(e.g., as described in connection with point 101-1 in FIG. 1A). At block437, the method 435 may include forming a material having a lower RI,relative to a RI of the hard mask material, (e.g., on) the hard maskmaterial (e.g., as described in connection with point 101-2 in FIGS. 1Aand 1 n FIG. 1B). At block 438, the method 435 may include implanting Aratoms through the lower RI material and into the C hard mask material toreduce a compressive stress in the C hard mask material (e.g., asdescribed in connection with point 101-5 in FIG. 1A).

The method 435 may further include forming a pillar of a semiconductordevice from the lower RI material, the C hard mask material, and thedielectric material and increasing the compressive stress in the C hardmask material by formation of the lower RI material over the C hard maskmaterial at a temperature of at least 200° C. The compressive stress inthe hard mask material may be increased to at least 150 MPa by formationof the lower RI material over the hard mask material (e.g., as describedin connection with method 330 and FIG. 3). The method 435 may furtherinclude subsequently reducing the increased compressive stress in thehard mask material by the Ar atoms being implanted into the C hard maskmaterial (e.g., instead of the C atoms being implanted as described inconnection with method 330 and FIG. 3).

The method 435 may further include subsequently reducing the increasedcompressive stress in the hard mask material by the Ar atoms beingimplanted through the lower RI material and into the hard mask materialsubsequent to formation of the lower RI material thereon. Thecompressive stress in the hard mask material may be reduced (e.g., fromthe at least 150 MPa) to below 25 MPa by the Ar atoms being implantedinto the hard mask material. The compressive stress has decreased tosubstantially 0 MPa by the Ar atoms being implanted into the hard maskmaterial subsequent to formation of the lower RI material thereon duringimplementation of some fabrication sequences.

A probability of an unintended bend, LWR, and/or SWR of the pillar maybe reduced by implantation of the Ar atoms to reduce the compressivestress in the hard mask material subsequent to formation of the lower RImaterial over the hard mask material. The reduced probability may bedetermined relative to the Ar atoms being implanted into the hard maskmaterial prior to formation of the lower RI material over the hard maskmaterial (e.g., as described in connection with FIG. 1B and inconnection with method 330 and FIG. 3).

The reduced probability of an unintended bend, LWR, and/or SWR of thepillar by the Ar atoms being implanted into the C hard mask materialalso may be determined relative to a probability of an unintended bend,LWR, and/or SWR when C atoms (instead of Ar atoms) are implanted intothe C hard mask material at a dose of C atoms/cm² that is at least equalto a dose of Ar atoms/cm². For example, during implementation of somefabrication sequences, the compressive stress (e.g., that causes theunintended bend, LWR, and/or SWR of a pillar) is notably lower when theAr atoms are implanted into the C hard mask material at a dose in arange of from around 1.0×10¹⁴/cm² to around 1.0×10¹⁵/cm², and, in anumber of embodiments, at an implant energy in a range of from around 10keV to around 60 keV, than when C atoms are implanted into the C hardmask material at a dose in a range of from around 1.0×10¹⁵/cm² to around1.0×10¹⁶/cm² and an implant energy in a range of from around 5 keV toaround 60 keV. In a number of embodiments, the implant energy used forthe Ar atoms may be in a range of from around 50 keV to around 80 keV,whereas the implant energy used for the C atoms may be in a range offrom around 20 keV to around 40 keV.

Accordingly. the method 435 may further include reducing a cost forsemiconductor device processing by implanting a dose of the Ar atoms/cm²into the C hard mask material that is less than a dose of C atoms/cm²potentially implanted into the C hard mask material. Reducing the cost,by the lesser dose of Ar atoms being implanted, may be accomplishedwhile also reducing a probability of an unintended bend, LWR, and/or SWRof a pillar to a level of a probability of an unintended bend, LWR,and/or SWR when the C atoms are implanted at a greater dose.

The method 435 may further include reducing a cost for semiconductordevice processing by use of a higher implant energy to implant the Aratoms into the C hard mask material than an implant energy potentiallyused to implant C atoms into the C hard mask material and implanting adose of the Ar atoms/cm² in less time than is used to implant an atleast equal dose of C atoms/cm². For example, during implementation ofsome fabrication sequences, a dose of the Ar atoms (e.g., 2.0×10¹⁵atoms/cm²) may be implanted into the C hard mask material using 60 keVin approximately half the time of an equal dose being implanted into theC hard mask material using 30 keV.

In addition, a dose of the Ar atoms that is notably less than a dose ofthe C atoms reduces the compressive stress to a MPa level at least aslow as achieved using a greater dose of the C atoms (e.g., 5.0×10¹⁴ Aratoms/cm² versus 2.0×10¹⁵ C atoms/cm²). Accordingly, a probability of anunintended bend, LWR, and/or SWR of a pillar may be reduced by the Aratoms being implanted relative to a probability of an unintended bend,LWR, and/or SWR when the C atoms are implanted at a substantially equaldose.

FIG. 5 is a functional block diagram of a system 550 for implementationof an example semiconductor fabrication process in accordance with anumber of embodiments of the present disclosure. The system 550 mayinclude a processing apparatus 551. The processing apparatus 551 may beconfigured to enable formation of structural materials on and/or removalof structural materials from a semiconductor device during fabricationof the semiconductor device.

The processing apparatus 551 may include a chamber 552 to enclosecomponents configured to perform wet or dry deposition or etchoperations, possibly in addition to other operations (e.g., by having asource for atom implantation operations), on a number of semiconductordevices (e.g., wafers on which memory devices 669, 775 or arrays 666 arebeing formed by the example semiconductor fabrication sequencesdescribed herein). The chamber 552 may further enclose a carrier 553 tohold a batch of semiconductor wafers 554. The processing apparatus 551may include and/or be associated with tools including, for example, apump 555 unit and a purge 556 unit configured to introduce and removeappropriate deposition chemistries and etch chemistries, or tools forperformance of an atom implantation process, as described herein, ateach point in the semiconductor fabrication sequence. The processingapparatus 551 may further include a temperature control 557 unitconfigured to maintain the chamber 552 at an appropriate temperature ateach of the points in the fabrication sequences. For example, thetemperature control 557 unit may be configured to bring the chamber 552to a raised temperature appropriate for performance of some processesand to reduce the temperature as appropriate for performance of otherprocesses (e.g., dry or wet deposition, etching, atom implantation,etc.). The system 550 may include a number of chambers 552 that are eachconfigured to perform particular processes (e.g., a wet etch process, adry etch process, a wet deposition process, a dry deposition process, awet clean process, a dry clean process, an atom implantation process,among others) during the fabrication sequence.

The system 550 may further include a controller 558. The controller 558may include, or be associated with, circuitry and/or programming forimplementation of, for instance, formation and removal of materials,including deposition, etching, and/or atom implantation of variousmaterials, related to reduction of compressive stress in a semiconductordevice. Adjustment of such deposition, etching, and atom implantationoperations by the controller 558 may control the CDs of thesemiconductor devices created in the processing apparatus 551.

A host may be configured to generate instructions related to capacitancereduction in a semiconductor device. An example of a host is shown at661 in FIG. 6, although embodiments are not limited to being coupled tothe memory system 663 shown in FIG. 6. The instructions may be sent viaa host interface 664 to the controller 558 of the processing apparatus551. The instructions may be based at least in part on scaledpreferences (e.g., in numerically and/or structurally defined gradients)stored by the host 661, provided via input from another storage system(not shown), and/or provided via input from a user (e.g., a humanoperator), among other possibilities. The controller 558 may beconfigured to enable input of the instructions and scaled preferences todefine the CDs of the fabrication of the semiconductor device to beimplemented by the processing apparatus 551.

The scaled preferences may determine final structures (e.g., the CDs) ofthe structural materials, conductive materials, insulating materials,semiconductor materials, substrate materials, dielectric materials, hardmask materials, lower RI materials, doses of implanted atoms, capacitormaterials, memory devices, and/or memory cells, among the various otherstructural features described herein. Particular CDs may be enabled bythe particular scaled preferences that are input via the instructions.Receipt and implementation of the scaled preferences by the controller558 may result in corresponding adjustment, by the processing apparatus551, of a deposition time for various materials, adjustment of acoverage area, height, and/or volume of the various materials,adjustment of an etch direction, adjustment of an etch time performed onthe various materials, and/or adjustment of the temperature during thevarious processes, among implementation of other possible scaledpreferences.

The controller 558 may, in a number of embodiments, be configured to usehardware as control circuitry. Such control circuitry may, for example,be an application specific integrated circuit (ASIC) with logic tocontrol fabrication steps, via associated deposition, etch, and/or atomimplantation processes, related to reduction of compressive stress in asemiconductor device, along with formation of the various materials onand removal of the various materials from the semiconductor device.

The controller 558 may be configured to receive the instructions anddirect performance of operations, corresponding to the instructions, bythe processing apparatus 551. The controller 558 may be configured toimplement the instructions to control a quantity of the variousmaterials that are formed on and removed from the semiconductor device.

FIG. 6 is a functional block diagram of a computing system 660 includingat least one memory system 663 in accordance with one or moreembodiments of the present disclosure. Memory system 663 may be, forexample, a solid-state drive (SSD).

In the embodiment illustrated in FIG. 6, memory system 663 includes amemory interface 664, a number of memory devices 669-1, . . . , 669-N,and a controller 665 selectably coupled to the memory interface 664 andmemory devices 669-1, . . . , 669-N. Memory interface 664 may be used tocommunicate information between memory system 663 and another device,such as a host 661. Host 661 may include a processor (not shown). Asused herein, “a processor” may be a number of processors, such as aparallel processing system, a number of coprocessors, etc. Example hostsmay include, or by implemented in, laptop computers, personal computers,digital cameras, digital recording devices and playback devices, mobiletelephones, PDAs, memory card readers, interface hubs, and the like.Such a host 661 may be associated with fabrication operations performedon semiconductor devices and/or SSDs using, for example, a processingapparatus.

In a number of embodiments, host 661 may be associated with (e.g.,include or be coupled to) a host interface 662. The host interface 662may enable input of scaled preferences (e.g., in numerically and/orstructurally defined gradients) to define, for example, CDs of a finalstructure or intermediary structures of a memory device (e.g., as shownat 669 and/or 775) and/or an array of memory cells (e.g., as shown at666) formed thereon. The scaled preferences may be provided to the hostinterface 662 via input of a number of preferences stored by the host661, input of preferences from another storage system (not shown),and/or input of preferences by a user (e.g., a human operator).

Memory interface 664 may be in the form of a standardized physicalinterface. For example, when memory system 663 is used for information(e.g., data) storage in computing system 661, memory interface 664 maybe a serial advanced technology attachment (SATA) interface, aperipheral component interconnect express (PCIe) interface, or auniversal serial bus (USB) interface, among other physical connectorsand/or interfaces. In general, however, memory interface 664 may providean interface for passing control, address, information, scaledpreferences, and/or other signals between the controller 665 of memorysystem 663 and a host 661 (e.g., via host interface 662).

Controller 665 may include, for example, firmware and/or controlcircuitry (e.g., hardware). Controller 665 may be operably coupled toand/or included on the same physical device (e.g., a die) as one or moreof the memory devices 669-1, . . . , 669-N. For example, controller 665may be, or may include, an ASIC as hardware operably coupled tocircuitry (e.g., a printed circuit board) including memory interface 664and memory devices 669-1, . . . , 669-N. Alternatively, controller 665may be included on a separate physical device that is communicativelycoupled to the physical device (e.g., the die) that includes one or moreof the memory devices 669-1, . . . , 669-N.

Controller 665 may communicate with memory devices 669-1, . . . , 669-Nto direct operations to sense (e.g., read), program (e.g., write),and/or erase information, among other functions and/or operations formanagement of memory cells. Controller 665 may have circuitry that mayinclude a number of integrated circuits and/or discrete components. In anumber of embodiments, the circuitry in controller 665 may includecontrol circuitry for controlling access across memory devices 669-1, .. . , 669-N and/or circuitry for providing a translation layer betweenhost 661 and memory system 663.

Memory devices 669-1, . . . , 669-N may include, for example, a numberof memory arrays 666 (e.g., arrays of volatile and/or non-volatilememory cells). For instance, memory devices 669-1, . . . , 669-N mayinclude arrays of memory cells, such as a portion of an example memorydevice 669, 775 structured to include access lines, sense lines, andelectrodes described in connection with FIGS. 2, 6, and 7, respectively.As will be appreciated, the memory cells in the memory arrays 666 ofmemory devices 669-1, . . . , 669-N may be in a RAM architecture (e.g.,DRAM, SRAM, SDRAM, FeRAM, MRAM, ReRAM, etc.), a flash architecture(e.g., NAND, NOR, etc.), a three-dimensional (3D) RAM and/or flashmemory cell architecture, or some other memory array architectureincluding pillars and adjacent trenches.

Memory devices 669, 775 may be formed on the same die. A memory device(e.g., memory device 669-1) may include one or more arrays 666 of memorycells formed on the die. A memory device may include sense circuitry 667and control circuitry 668 associated with one or more arrays 666 formedon the die, or portions thereof. The sense circuitry 667 may be utilizedto determine (sense) a particular data value (e.g., 0 or 1) that isstored at a particular storage node 262, 762 (e.g., memory cell) in arow of an array 666. The control circuitry 668 may be utilized to directthe sense circuitry 667 to sense particular data values, in addition todirecting storage, erasure, etc., of data values in response to acommand from host 661 and/or host interface 662. The command may be sentdirectly to the control circuitry 668 via the memory interface 664 or tothe control circuitry 668 via the controller 665.

The embodiment illustrated in FIG. 6 may include additional circuitrythat is not illustrated so as not to obscure embodiments of the presentdisclosure. For example, memory devices 669, 775 may include addresscircuitry to latch address signals provided over I/O connectors throughI/O circuitry. Address signals may be received and decoded by a rowdecoder and a column decoder to access a memory array 666. It will beappreciated that the number of address input connectors may depend onthe density and/or architecture of memory devices 669, 775 and/or memoryarrays 666.

FIG. 7 illustrates an example cross-sectional view of a portion of asemiconductor memory device 775 in accordance with a number ofembodiments of the present disclosure. FIG. 7 illustrates neighboringaccess devices 786 and 787 (e.g., memory cell transistors) as may bepresent in a memory array of a memory device such as shown in FIG. 6. Inthe example embodiment of FIG. 7, the neighboring access devices 786 and787 are shown as buried recessed access devices (BRADs). Embodiments,however, are not limited to this example. In a semiconductor fabricationprocess, a gate dielectric 781 and semiconductor materials may bedeposited to form access device gates 778 and 779 according to aparticular BRAD design process. Embodiments are not limited to theexample shown. In this example of neighboring BRAD devices 786 and 787,the access devices may be formed to a particular depth in gate areas777-1 and 777-2 of substrate material 776.

As shown in FIG. 7, the gates 778, 779 are formed for the access devices786 and 787. As shown, gate 778 may be a gate to a recessed accessdevice (e.g., a BRAD). In the example shown, the gate 778 may include agate material 778 including a metal (e.g., titanium nitride) and a gatematerial 779 including a doped polysilicon to form a hybrid metal gate.The gate 778 may be separated from a channel 782, separating a firstsource/drain region 784-1 and 784-2 (collectively or individuallyreferred to as first source/drain region 784) and a second source/drainregion 783-1 and 783-2 (collectively or individually referred to assecond source/drain region 783) by a gate dielectric 781.

In the example of FIG. 7, the two neighboring access devices 786 and 787are shown sharing a second source/drain region 783 at a junction. Asense line contact 703 may be formed of a metallic material, or ofanother conductive contact. The sense line contact 703 may be formed incontact with the second source/drain region 783 at the junction. A senseline pillar 715 (e.g., shown at 115 and described in connection withFIG. 1A and elsewhere herein) may be formed in contact with the senseline contact 703. A storage node contact 789 may be coupled to eachfirst source/drain region 784, and a storage node 790-1, 790-2 may becoupled to the storage node contact 789. An insulation material 788(e.g., a dielectric material) may be formed on spacer material 785 andmask material 780 to separate conductive storage node contacts 789.

In a number of embodiments, a portion of the sense line contact 703 maybe formed in contact with spacer material 785, the second source/drainregions 783, and the junction. Insulation material 788 may be formed onthe spacer material 785, the mask material 780, and in contact with aportion of the sense line contact 703 and storage node contacts 789. Agate dielectric 781 separates the gate 778 from the channel 782 for eachof the neighboring BRAD devices 786 and 787 shown in the example memorydevice 775 of FIG. 7.

In the above detailed description of the present disclosure, referenceis made to the accompanying drawings that form a part hereof, and inwhich is shown by way of illustration how one or more embodiments of thedisclosure may be practiced. These embodiments are described insufficient detail to enable those of ordinary skill in the art topractice the embodiments of this disclosure, and it is to be understoodthat other embodiments may be utilized and that process, electrical,and/or structural changes may be made without departing from the scopeof the present disclosure. Moreover, the structural features illustratedin the accompanying drawings are intended to indicate relativepositioning of the structural features in one or more embodiments andare not necessarily drawn to scale relative to other structural featuresin the drawings or otherwise.

It is to be understood that the terminology used herein is for thepurpose of describing particular embodiments only and is not intended tobe limiting. As used herein, the singular forms “a”, “an”, and “the”include singular and plural referents, unless the context clearlydictates otherwise, as do “a number of”, “at least one”, and “one ormore” (e.g., a number of memory arrays may refer to one or more memoryarrays), whereas a “plurality of” is intended to refer to more than oneof such things. Furthermore, the words “can” and “may” are usedthroughout this application in a permissive sense (i.e., having thepotential to, being able to), not in a mandatory sense (i.e., must). Theterm “include,” and derivations thereof, means “including, but notlimited to”. The terms “coupled” and “coupling” mean to be directly orindirectly connected physically for access to and/or for movement(transmission) of instructions (e.g., control signals, address signals,etc.) and data, as appropriate to the context.

While example embodiments including various combinations andconfigurations of structural materials, atoms to be implanted into thehard mask materials, semiconductor materials, substrate materials, hardmask materials, lower RI materials, pillar materials, conductivematerials, dielectric materials, capacitor materials, memory devices,memory cells, pillars, openings, sidewalls of the pillars and/oropenings, among other materials and/or components related to atomimplantation for reduction of compressive stress in material of asemiconductor device, have been illustrated and described herein,embodiments of the present disclosure are not limited to thosecombinations explicitly recited herein. Other combinations andconfigurations of the structural materials, atoms to be implanted intothe hard mask materials, semiconductor materials, substrate materials,hard mask materials, lower RI materials, pillar materials, conductivematerials, dielectric materials, capacitor materials, memory devices,memory cells, pillars, openings, sidewalls of the pillars and/oropenings, among other materials and/or components related to atomimplantation for reduction of compressive stress than those disclosedherein are expressly included within the scope of this disclosure.

Although specific embodiments have been illustrated and describedherein, those of ordinary skill in the art will appreciate that anarrangement calculated to achieve the same results may be substitutedfor the specific embodiments shown. This disclosure is intended to coveradaptations or variations of one or more embodiments of the presentdisclosure. It is to be understood that the above description has beenmade in an illustrative fashion, and not a restrictive one. Combinationof the above embodiments, and other embodiments not specificallydescribed herein will be apparent to those of skill in the art uponreviewing the above description. The scope of the one or moreembodiments of the present disclosure includes other applications inwhich the above structures and processes are used. Therefore, the scopeof one or more embodiments of the present disclosure should bedetermined with reference to the appended claims, along with the fullrange of equivalents to which such claims are entitled.

In the foregoing Detailed Description, some features are groupedtogether in a single embodiment for the purpose of streamlining thedisclosure. This method of disclosure is not to be interpreted asreflecting an intention that the disclosed embodiments of the presentdisclosure have to use more features than are expressly recited in eachclaim. Rather, as the following claims reflect, inventive subject matterlies in less than all features of a single disclosed embodiment. Thus,the following claims are hereby incorporated into the DetailedDescription, with each claim standing on its own as a separateembodiment.

1. A method, comprising: patterning a working surface of asemiconductor, the working surface having a hard mask material formedover a dielectric material; forming a material having a lower refractiveindex (RI), relative to a RI of the hard mask material, over the hardmask material; and implanting atoms through the lower RI material andinto the hard mask material to reduce a compressive stress in the hardmask material.
 2. The method of claim 1, further comprising: forming thelower RI material over the hard mask material prior to implanting theatoms; wherein the lower RI material is a last material formed over thehard mask material at a temperature greater than 100 degrees Celsius. 3.The method of claim 1, further comprising: forming a photoresistmaterial in a pattern over the lower RI material; removing a portion ofthe lower RI material consistent with the pattern to initiate formationof a pillar of a semiconductor device; and implanting the atoms througha remaining lower RI material and into the hard mask material to reducea probability of an unintended bend of the pillar based on the reducedcompressive stress in the hard mask material.
 4. The method of claim 3,wherein to reduce the probability of the unintended bend of the pillarcomprises reducing a potential level of line width roughness on thepillar.
 5. The method of claim 3, wherein to reduce the probability ofthe unintended bend of the pillar comprises reducing a potential levelof space width roughness between the pillar and an adjacent pillar. 6.The method of claim 1, further comprising: performing an etch processthrough the lower RI material, the hard mask material, and thedielectric material to form a pillar of a semiconductor device; formingthe pillar to have a height to width aspect ratio (AR) in a range offrom 20:1 to 30:1; and reducing a probability of an unintended bend ofthe pillar relative to a pillar having an AR in the range that does notinclude the atoms implanted through the lower RI material and into thehard mask material to reduce the compressive stress in the hard maskmaterial.
 7. The method of claim 6, wherein to form the pillar comprisesforming a sense line pillar to enable conductive contact with a datastorage node of the semiconductor device.
 8. The method of claim 1,further comprising: patterning the working surface of the semiconductorto have a first hard mask material formed over the dielectric material;forming a first lower RI material, relative to a RI of the first hardmask material, over the first hard mask material; forming a second hardmask material over the first lower RI material; and forming a secondlower RI material, relative to a RI of the second hard mask material,over the second hard mask material; and implanting the atoms through thefirst and second lower RI materials and into the first and second hardmask materials to reduce the compressive stress in the first and secondhard mask materials.
 9. A portion of a memory device formed by themethod of claim 1, wherein: the memory device comprises a memory cellstructure that includes: a sense line pillar comprising the dielectricmaterial, the hard mask material, the lower RI material, and theimplanted atoms; a capacitor, as a data storage node, in conductivecontact with the sense line pillar; and an access device in conductivecontact with the sense line pillar.
 10. A method, comprising: patterninga working surface of a semiconductor, the working surface having a hardmask material, which includes carbon (C), formed over a dielectricmaterial; forming a material having a lower refractive index (RI),relative to a RI of the hard mask material, over the hard mask material;and implanting C atoms through the lower RI material and into the hardmask material to reduce a compressive stress in the hard mask material.11. The method of claim 10, further comprising forming the dielectricmaterial from a silicon nitride material.
 12. The method of claim 10,further comprising forming the hard mask material from substantiallypure carbon.
 13. The method of claim 10, further comprising forming thelower RI material from nitrous oxide (N₂O) plasma at a temperature in arange of from 350 degrees Celsius (° C.) to 450° C.
 14. The method ofclaim 10, further comprising forming the lower RI material from nitrousoxide (N₂O) and silane (SiH₄) at a temperature in a range of from 350degrees Celsius (° C.) to 450° C.
 15. The method of claim 10, furthercomprising: increasing the compressive stress in the hard mask materialby formation of the lower RI material over the hard mask material at atemperature of at least 200 degrees Celsius (° C.); and subsequentlyreducing the increased compressive stress in the hard mask material bythe C atoms being implanted into the hard mask material.
 16. The methodof claim 10, further comprising: increasing the compressive stress inthe hard mask material to at least 150 megapascals (MPa) by formation ofthe lower RI material over the hard mask material; and subsequentlyreducing the increased compressive stress in the hard mask material tobelow 25 MPa by the C atoms being implanted into the hard mask material.17. The method of claim 10, further comprising: forming a pillar of asemiconductor device from the lower RI material, the hard mask material,and the dielectric material; and reducing a probability of an unintendedbend of the pillar by implantation of the C atoms to reduce thecompressive stress in the hard mask material subsequent to formation ofthe lower RI material over the hard mask material; wherein the reducedprobability is relative to the C atoms being implanted into the hardmask material prior to formation of the lower RI material over the hardmask material.
 18. The method of claim 17, wherein forming the lower RImaterial over the hard mask material subsequent to the C atoms beingimplanted into the hard mask material increases the compressive stressin the C-implanted hard mask material.
 19. The method of claim 10,further comprising: implanting the C atoms into the hard mask materialat: a dose in a range of from 1×10¹⁵ per square centimeter (/cm²) to1×10¹⁶/cm²; and an implant energy in a range of from 5 kiloelectronvolts (keV) to 60 keV.
 20. A method, comprising: patterning a workingsurface of a semiconductor, the working surface having a hard maskmaterial, formed from carbon (C), formed over a dielectric material;forming a material having a lower refractive index (RI), relative to aRI of the hard mask material, over the C hard mask material; andimplanting argon (Ar) atoms through the lower RI material and into the Chard mask material to reduce a compressive stress in the C hard maskmaterial.
 21. The method of claim 20, further comprising: increasing thecompressive stress in the C hard mask material by formation of the lowerRI material over the C hard mask material at a temperature of at least200 degrees Celsius (° C.); and subsequently reducing the increasedcompressive stress in the hard mask material by the Ar atoms beingimplanted into the C hard mask material.
 22. The method of claim 20,further comprising: increasing the compressive stress in the C hard maskmaterial to at least 150 megapascals (MPa) by formation of the lower RImaterial over the hard mask material; and subsequently reducing theincreased compressive stress in the C hard mask material to below 25 MPaby the Ar atoms being implanted into the C hard mask material.
 23. Themethod of claim 20, further comprising: forming a pillar of asemiconductor device from the lower RI material, the C hard maskmaterial, and the dielectric material; and reducing a probability of anunintended bend of the pillar by implantation of the Ar atoms into the Chard mask material subsequent to formation of the lower RI material overthe C hard mask material.
 24. The method of claim 23, wherein reducingthe probability of the unintended bend is relative to the Ar atoms beingimplanted into the C hard mask material prior to formation of the lowerRI material over the C hard mask material.
 25. The method of claim 23,wherein reducing the probability of the unintended bend by the Ar atomsbeing implanted into the C hard mask material is relative to aprobability of an unintended bend when C atoms are implanted into the Chard mask material at a dose per square centimeter (/cm²) that is atleast equal to a dose of Ar atoms/cm².
 26. The method of claim 24,further comprising: implanting the Ar atoms into the C hard maskmaterial at a dose in a range of from 1.0×10¹⁴/cm² to 1.0×10¹⁵/cm² andan implant energy in a range of from 10 kiloelectron volts (keV) to 60keV; and implanting the C atoms into the C hard mask material at a dosein a range of from 1.0×10¹⁵/cm² to 1.0×10¹⁶/cm² and an implant energy ina range of from 5 keV to 60 keV.
 27. The method of claim 20, furthercomprising: reducing a cost for semiconductor device processing byimplanting a dose of the Ar atoms per square centimeter (/cm²) into theC hard mask material that is less than a dose of C atoms/cm² potentiallyimplanted into the C hard mask material; and reducing, by the lesserdose of Ar atoms being implanted, a probability of an unintended bend toa level of a probability of an unintended bend when the C atoms areimplanted at a greater dose.
 28. The method of claim 20, furthercomprising: reducing a cost for semiconductor device processing by: useof a higher implant energy to implant the Ar atoms into the C hard maskmaterial than an implant energy potentially used to implant C atoms intothe C hard mask material; and implant of a dose of the Ar atoms persquare centimeter (/cm²) in less time than is used to implant an atleast equal dose of C atoms/cm²; and reducing a probability of anunintended bend by the Ar atoms being implanted relative to aprobability of an unintended bend when the C atoms are implanted at asubstantially equal dose.